Understanding of the mechanism of pulsed NH3 growth in metalorganic chemical vapor deposition | Deep Literature

Understanding of the mechanism of pulsed NH3 growth in metalorganic chemical vapor deposition

Journal of Crystal Growth (2015)

Jie Song Danti Chen Jung Han

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Keywords:

Facet (psychology)

Deposition

Topics:

GaN-based semiconductor devices and materials

Ga2O3 and related materials

ZnO doping and properties

10.1016/j.jcrysgro.2014.12.041

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