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    Determination of Rare Earth Elements in Biological and Mineral Apatite by EPMA and LAMP-ICP-MS
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    Keywords:
    Neutron Activation Analysis
    Microanalysis
    Electron probe microanalysis
    EMPA
    Rare-earth element
    Abstract A method is described to measure composition profiles of layer systems on substrates by electron probe microanalysis with an improved effective spatial resolution down to 0.1 μm. The resolution problem in microanalysis of angle lapped layers and the related experimental problems are discussed and examples of composition profile measurements at GaAs‐Al x Ga 1– x As double‐heterostructures are presented.
    Microanalysis
    Electron probe microanalysis
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